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Stress Measurement System
With a strong business success for both companies in the past, Toho and KLA-Tencor have officially concluded the next transfer of technology, which has resulted in a long awaited upgrade to KLA-Tencor’s industry standard stress measurement system, the FLX-2320.
Toho Technology has released a new and improved version, the FLX-2320-S, featuring a new Windows XP operating platform that drives the most reliable bench top stress measurement tool in the industry.
Flat Panel Profiler
Toho Technology has an on going partnership with the KLA-Tencor stemming from the official transfer of the Flat Panel Metrology business, which Toho acquired, from KLA-Tencor in 1999. The all new Toho FP-20, 21 and 22 incorporate KLA-Tencor’s proprietary Micro Head low-force measurement head. With its diamond stylus at the tip, it allows low stylus force to touch the surface and achieve high accuracy measurements to analyze step height, roughness, waviness and radius of curvature on a Flat Panel Substrate.
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