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Scanning Mechanism
To precisely scan a pattern on a glass sample, the FP series utilizes a specialized scanner which mainly consists of an X-drive assembly and an optical flat.
The X-drive is equipped with two motors, (slow / fast) that allow for more efficient scanning. The optical flat allows for the stylus to trace a pattern on a sample in a straight line.
Measurement Theory
The Micro Head has an “L-Stylus” that achieves a pattern trace with appropriate force. Depending on the material of the pattern this force is controlled to prevent damage. The sensor in the head detects the subtle movement of the stylus and the data captured in the Micro Head is then sent to the computer for manipulation.
FP has 2 different structures depending on sample sizes
A-type: Head Stationary / Stage moves (G4 or smaller sample size)
With smaller glass substrates, the original KLA-Tencor design with the moveable stage is used. Under the measurement table there are 2 lead screws (X and Y) for location of a measurement point and for the scanner that moves for a measurement while the Micro Head with the stylus is fixed over the table. This type is suitable for smaller samples and smaller space.
X-type: Head Moves / Stage is stationary (G4.5 or larger sample size)
With larger glass panels, noise can be generated with sample handling. The X-type FP series solves this issue with a moveable Micro Head.
The measurement table only has an X axis and a granite gantry hangs the scanner with the Micro Head with a Y axis. This structure allows for faster measurement site with more reliable data at all points on the sample. The scanner moves the Micro Head over the measurement table to measure the pattern while the table is fixed.
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