Setting Recipe and Measurement
Machine Adjustment
Machine Setting
Data Management
CIM Setting
Micro Head Diagnostics
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Catalog
In the Catalog window, operator s can view recipes and data stored in the computer.
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Recipe Editor
The Recipe editor can easily create original scan recipes with individual settings such as scan length, scan speed, sampling rate, stylus force and so on.
Over 500 recipes can be saved, recalled and modified.
up to 90 mm
up to 25 mm/sec
up to 200 points/sec
average data ≤10 times repetition of a scan
from 0.5 mg to 15 mg
stylus drop speed (1 to 10)
choose either 2.0Å/±13µm or 10.0Å/±65 µm
3 types (normal / high peak / deep valley)
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Sequence Editor
In the Catalog window, operator s can view recipes and data stored in the computer.
Operators can create a sequence recipe selecting various scan recipes shown on the left side of the window and teaching a scan site for each scan recipe. This will greatly improve productivity.
Over 500 recipes can be saved, recalled and modified
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XY–View
Operators can search for a desired site to be measured. Click any point on the sample map on the right to move to a new scan site.
Operators can create a sequence recipe selecting various scan recipes shown on the left side of the window and teaching a scan site for each scan recipe. This will greatly improve productivity.
Over 500 recipes can be saved, recalled and modified
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Click on image from the camera on the left side of the window or use arrow keys in the tool bar to find the pattern and to accurately define a starting point of a scan.
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Once a scan begins, the image appears to verify accuracy of target pattern.
