|
FP
|
A-type |
X-type
|
| Sample Size (mm) |
300 – 880 |
920 – 2400 |
| X, Y movement |
Moving Stage (X, Y)
Lead screw + DC servo motor |
Moving Stage (X) & Moving Head (Y)
Scale + AC servo motor |
| Z movement |
Slide block + LM guide |
Slide block + LM guide + Million guide |
| THETA movement |
Wheel & Wormgear + DC servo motor
0 – 360 degree |
Built-in motor guide + AC servo motor
0 – 90 / -90 degrees |
| Noise Isolator |
Equipped (Passive or Active) |
Equipped (Passive or Active) |
| Scan Length |
Max 90 mm |
Max 90 mm |
| Scan Speed |
1µm / sec ~ 25mm / sec |
1µm / sec ~ 25mm / sec |
| Sampling Rate |
50 / 100 / 200 / sec |
50 – 200 / sec |
| Throat Height |
15 mm |
15 mm |
| Vertical Range |
0 – 130 µm |
0 – 130 µm |
| L – Stylus |
2 µm / 60 degrees |
2 µm / 60 degrees |
| Stylus Force |
0.5 mg – 15 mg |
0.5 mg – 15 mg |
| Stylus Force Resolution |
0.05 mg |
0.05 mg |
| Scan Repeatability |
10Å (stage center) |
10Å (stage center) |
| X and Y Repeatabilitiy |
± 2 µm |
± 2 µm |
| Pattern Recognition |
Manual (Auto / option) |
Auto |
| Low Magnification Lens |
N/A |
Option |
| Floor condition |
VC-D |
VC-C |
