|
The Toho FP-series has been improving continually to meet stringent customer requirements and has gained trust in the flat panel display industry. Inparticular, users are highly satisfied with the accuracy of the KLA-Tencor Micro Head II, and the newly revised, user friendly software interface.
Essential for defect analysis and maximizing yield, the FP series also offers valuable options such as such as SECS/GEM Interface and Auto Pattern Recognition to increase Fab efficiency.
|
Standard Features
- KLA-Tencor “Micro Head II”
- Sequence data base manager
- Pentium 4, 2.8GB processor or better
- 512MB RAM
- Windows based Operating System
- 40G Hard disk
- CD/RW Drive
- 15 inch monitor
- Color Camera for searching and scanning
- Color Printer
- L-Stylus (2µm, 60°)
- Operation Manual
Optional Features
- SECS/GEM interface
- Off-Line Software
- Auto Pattern Recognition
- UPS Unit
- VLSI Standard
- L-Stylus (additional)
|
|
|
|
|
